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English
Noun
nanotrenches
- plural of nanotrench
2016, Feng Xiong, Sanchit Deshmukh, Sungduk Hong, Yuan Dai, Ashkan Behnam, Feifei Lian, Eric Pop, “SANTA: Self-Aligned Nanotrench Ablation via Joule Heating for Probing Sub-20 nm Devices”, in arXiv:We achieve sub-20 nm nanotrenches for the first time, by lowering the ambient temperature and reducing the PMMA thickness.