silicon nitride
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English
Noun
silicon nitride (plural silicon nitrides)
- (chemistry) An inorganic polymer, of empirical formula Si3N4, used in ceramics and some transistors.
- 2005, Paolo Dario, Raja Chatila, Robotics Research: The Eleventh International Symposium, page 506:
- This process provides an unpatternable sheet of silicon nitride that electrically isolates the devices