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English
Pronunciation
Etymology 1
From salicin + -ide.
Noun
salicide (plural salicides)
- (chemistry) A compound of salicin e.g. salicide of potassium, hydrogen salicide
Etymology 2
Blend of self + aligned + silicide
Noun
salicide (plural salicides)
- (silicon microelectronics) An electrical contact made from a silicide whose formation does not require lithographic patterning processes, i.e. it is "self-aligned"
1983 November 11, T. Paul Chow, Andrew J. Steckl, “Refractory Metal Silicides: Thin-Film Properties and Processing Technology”, in IEEE Trans. on Electron Devices, volume ED-30, number 11, November 1983, pages 1480–1497:Composite: Self-aligned silicide/poly Si gate (salicide) (label on Figure 7d)
1993, Khalid Sheergar, Platinum salicide process for BiCMOS applications, thesis, Carleton University:Platinum salicide process for BiCMOS applications
1995, Wlodek Kaplan, Titanium SALICIDE Process for VLSI Device Application, Royal Institute of Technology:Titanium SALICIDE Process for VLSI Device Application
2007, T. Yamaguchi et al., A Novel Low Leakage-Current Ni SALICIDE Process in nMOSFETs on Si(110) Substrate, 2007 IEEE International Electron Devices Meeting:A Novel Low Leakage-Current Ni SALICIDE Process in nMOSFETs on Si(110) Substrate
2010, Yi-Wei Chen et al., Advances on NiPt SALICIDE process optimization for 28nm CMOS manufacturing, 2010 International Symposium on Semiconductor Manufacturing (ISSM):Advances on NiPt SALICIDE process optimization for 28nm CMOS manufacturing
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