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Usually held to be a borrowing from Latin-ārius; at the very least, it was probably influenced and reinforced by it.
However, Gąsiorowski instead suggests that *-ārijaz is a native formation; he derives it from earlier *-azrijaz, which he etymologises as a zero-grade form of *-sōr suffixed with *-ih₂, creating a suffix *-sr-ih₂ for forming feminine agent nouns, which was then masculinised by attaching *-ós. He also suggests a relation to Proto-West Germanic *-astrijā.
→ Proto-Slavic: *-ařь (see there for further descendants)
References
^ Piotr Gąsiorowski (2017 November 17) “Cherchez la femme: Two Germanic suffixes, one etymology”, in Folia Linguistica Historica, volume 51, number s38, →DOI, pages 125–147